JPH04522Y2 - - Google Patents

Info

Publication number
JPH04522Y2
JPH04522Y2 JP1984156872U JP15687284U JPH04522Y2 JP H04522 Y2 JPH04522 Y2 JP H04522Y2 JP 1984156872 U JP1984156872 U JP 1984156872U JP 15687284 U JP15687284 U JP 15687284U JP H04522 Y2 JPH04522 Y2 JP H04522Y2
Authority
JP
Japan
Prior art keywords
electron
electron beam
sample
focusing lens
excitation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984156872U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6171952U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984156872U priority Critical patent/JPH04522Y2/ja
Publication of JPS6171952U publication Critical patent/JPS6171952U/ja
Application granted granted Critical
Publication of JPH04522Y2 publication Critical patent/JPH04522Y2/ja
Expired legal-status Critical Current

Links

JP1984156872U 1984-10-16 1984-10-16 Expired JPH04522Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984156872U JPH04522Y2 (en]) 1984-10-16 1984-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984156872U JPH04522Y2 (en]) 1984-10-16 1984-10-16

Publications (2)

Publication Number Publication Date
JPS6171952U JPS6171952U (en]) 1986-05-16
JPH04522Y2 true JPH04522Y2 (en]) 1992-01-09

Family

ID=30714878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984156872U Expired JPH04522Y2 (en]) 1984-10-16 1984-10-16

Country Status (1)

Country Link
JP (1) JPH04522Y2 (en])

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577000A (en) * 1978-12-06 1980-06-10 Hitachi Ltd Electron beam radiation device
JPS5957849U (ja) * 1982-10-08 1984-04-16 日本電子株式会社 電子顕微鏡等の試料交換装置
JPS60115468A (ja) * 1983-11-28 1985-06-21 Fuji Xerox Co Ltd プリンタ

Also Published As

Publication number Publication date
JPS6171952U (en]) 1986-05-16

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